Afilm Semiconductor Made a Grand Appearance at WESEMiBAY

Afilm Semiconductor has long focused on the core aspects of semiconductor manufacturing, targeting two key strategic directions to provide full‑chain technical support for the industry:

Semiconductor thin film deposition equipment: covering 12‑inch PECVD (Plasma Enhanced Chemical Vapor Deposition), PEALD (Plasma Enhanced Atomic Layer Deposition), and PEALE (Plasma Enhanced Atomic Layer Etching) equipment, meeting the demands of advanced process chip manufacturing;

Plasma power supplies and auxiliary components: including RF power supplies, DC power supplies, RF matching units, impedance sensors and other core components, ensuring stable and efficient operation of semiconductor equipment.

At this WESEMiBAY, Afilm Semiconductor displayed three thin film deposition systems and multiple auxiliary power units, highlighting their precision, adaptability, and efficiency, and demonstrating the technological prowess：

(I) Thin film Deposition Equipment: adapt to multi-scenario process requirements

Two automatic impedance matching units, Cruiser Solo and Cruiser Duo, can achieve impedance matching between the RF power supply and the PECVD chamber efficiently and precisely, with a matching time of less than 2 seconds, and the impedance matching range and input/output interfaces can be flexibly customized according to customer requirements. A Cruiser Duo integrates dual‑frequency and four‑set impedance matching into a single unit, helping customers optimize space utilization and improve overall efficiency.