Good News! Afilm Semiconductor Delivered the First 12-inch PECVD Amorphous Carbon Equipment "Dubhe" to the Industry Leading Customer

Afilm Semiconductor's first 12‑inch Dubhe series plasma enhanced equipment can support customers' amorphous carbon film processes for 90nm, 55nm, 28nm, and below nodes, matching the process specifications of comparable equipment from mainstream foreign manufacturers. It offers advantages such as higher production efficiency and a wider process window. The system is equipped with self‑developed RF control systems, atmospheric and vacuum transfer platforms, as well as proprietary software control systems that can integrate with customers' EAP and MES systems to enable automated and efficient production. The equipment can be widely applied in the manufacturing of logic chips, memory chips, MEMS, power devices, silicon‑based micro‑displays, silicon photonics, and advanced packaging. In addition, Afilm Semiconductor can conduct process development and optimization according to customer needs and provide long‑term technical support.

Currently, Afilm Semiconductor's R&D laboratory is equipped with a variety of R&D process equipments, can support customer to verify multiple thin film deposition processes, including PE‑TEOS oxide, BP‑TEOS, PE‑SiH₄ Oxide, PE‑SiN, Carbon and so on. Looking ahead, the company will continue to increase R&D investment, actively attract overseas talents, establish and expand global R&D teams, strengthen technical cooperation and exchanges with customers, develop advanced semiconductor thin film deposition equipment for logic chips, memory chips, MEMS, power devices, silicon-based micro-displays, silicon photonics, and advanced packaging applications, guide and assist customers in process development and product roadmap formulation, and strive to grow into a diversified platform-based semiconductor equipment company in a relatively short time, continuously contributing to breaking foreign technology monopolies and supporting the nation's semiconductor development strategy and technological revitalization.

As a high‑end semiconductor equipment supplier with core independent IP rights, Afilm Semiconductor specializes in the R&D, manufacturing, sales, and technical services of semiconductor front‑end process equipment, and the primary products are thin film deposition process equipments. The company places great emphasis on IP protection. Since its establishment one year ago, it has applied for 15 invention patents, 8 utility model patents, and 2 software copyrights. Multiple inventions and copyrights have been granted and applied to the research, development, and production of thin film deposition equipment. Meanwhile, the company received multiple honors in 2024, such as the Innovative SME, the Jiangsu Province Potential Unicorn Enterprise, the Jiangsu Province Sci‑Tech SME, and the Wuxi Quasi‑Unicorn Enterprise.