PLP
The PLP (Panel-Level Packaging) PECVD tool is an advanced system developed by Afilm for glass substrate packaging, used for the deposition of SiO, SiN, SiON, SiCN, and SiOC:H organic–inorganic hybrid films.
The PLP (Panel-Level Packaging) PECVD tool is an advanced system developed by Afilm for glass substrate packaging, used for the deposition of SiO, SiN, SiON, SiCN, and SiOC:H organic–inorganic hybrid films.
