HDR

The HDR (High Deposition Rate) tool is a high-deposition-rate silicon oxide film system developed by Afilm for inter-die gap-fill oxide applications in advanced packaging. It can deposit over 30 µm of film in a single pass at temperatures of 180–280°C, with a cumulative film thickness exceeding 120 µm, meeting the die-to-die isolation requirements of HBM, chiplet, and similar applications.