UV Cure

UV Cure tool is the companion curing solution for the dielectric thin-film deposition process. Through precise UV-light crosslinking curing, it significantly enhances the mechanical strength and stability of the dielectric film by keeping its dielectric constant. The tool can achieve  "deposition–curing" integrated synergy, perform controllable curing, improve the yield and throughput, break reliance on imported high-end curing equipment, and serve advanced-node interconnect technology.