12-inch PECVD System

Merak is Afilm's proprietary advanced transfer platform, featuring a compact footprint and high throughput. It can be configured with a wide range of process chambers — including CFP a-Carbon, PE TEOS, PE SiH4, DARC, NF DARC, Nitride, a-Si, HDR TEOS, and LDF II — delivering diverse and advanced process solutions for customers in Logic, Memory, AP (HBM, CPO, etc.), CIS, Wafer Maker, and Specialty (Power, BCD, µOLED, etc.) applications.